Manufacturer: EVG
Model: Gemini
Vintage: 2013
Condition: used
Fully automated operation
Interlocked doors with signal light tower
4 Axis Industrial Robot
EVG CIM Framework Software GUI (Graphical User Interface)
Flexible process flow definition
Drag and drop recipe programming
Parallel processing of multiple jobs
Automated recording of process and machine parameters
Throughput optimized handling sequence
Password protected user access levels
Open cassette loading with empty/present sensor
Wafer size: up to 8"/200mm
One Set of Tooling included
SmartView®NT Alignment Module with 5x Objectives
4 Bond modules with up to 550°C and 10kN bond force (40kN Upgrade available upon request)
Formic Acid Bubbler option for purging formic acid vapor into bond chamber
1 purge gas line for process gas
System CE Marked
PDF Manuals
Refurbishment, warranty, installation, training, service and support available