Manufacturer: EVG
Model: 810 LT
Vintage: 2020
Condition: used
Refurbishment, warranty, installation, training, service and support available
EVG 810 Low Temperature Plasma Activation System
For SOI, MEMS and compound semiconductor bonding
Process gas lines (qty: 2)
Vacuum system
Automated chamber opening
Manual wafer loading

Item ID: LES-9107