Manufacturer: EVG
Model: 520IS
Vintage: 2022
Condition: used
Manual wafer load substrate bonder
Capable of fusion compression bonding
Capable of thermal compression bonding
Ideal for R&D and pilot production applications
High-vacuum capable bond chamber
Auto opening of bond tool cover
Windows based control software and operation interface
Wafer size: up to 6"/150mm capable
Max Bond Force: 10kN (upgrade to 20kN/40kN upon request)
Top side heater: 550°C max. in 1°C steps
Bottom side heater: 550°C max. in 1°C steps
Chiller
Temperature uniformity: ±1.8% or ± 3°C degrees, whichever is greater.
Turbo pump and controller
Roughing pump
Load/unload tool
System computer, monitor, and keyboard
PDF Operations Manual for EVG 520IS Bonder
Available for full inspection and demonstration
Installation, training, service and support available with 30 Day Right of Return