Manufacturer: EVG
Model: 6200NT
Vintage: 2017
Condition: used
Topside Alignment (TSA)
Backside Alignment (BSA)
Manual Handling
Automated Controlled Stage
Wafer Size: up to 8"/200mm
One Set of Tooling Included
Objectives: 10x (topside), 5x (backside)
Tooling Tray
Uniformity Test Plate
EVG 6200 offers Proximity, Soft Contact, Hard Contact or Vacuum Contact Exposure Modes
Tooling Exchanges are Quick, Simple and can be Performed Within Minutes
Dual Wavelength LED Lamphouse (365 + 405nm)
Microsoft Windows based User Interface
System PC, Keyboard, Cables
PDF Manual for EVG 6200NT
Available for full inspection and demonstration
Installation, training, service and support available with 30 Day Right of Return