Manufacturer: EVG
Model: 620
Vintage: 2001
Condition: used
Topside Alignment (TSA)
Backside Alignment (BSA)
Manual Handling
Manually Controlled Stage
Wafer Size: up to 6"/150mm
One Set of Tooling included
Objectives: 10x (topside) & 5x (backside)
Tooling Tray
Uniformity Test Plate
EVG 620 offers Proximity, Soft Contact, Hard Contact or Vacuum Contact Exposure Modes
Tooling Exchanges are Quick, Simple and can be Performed Within Minutes
Lamphouse: 350W Lamphouse (Upgrade to Dual Wavelength LED Lamphouse available upon request)
Microsoft Windows based User Interface
System PC, Keyboard, Cables
PDF Manual for EVG 620
Available for full inspection and demonstration
Installation, training, service and support available with 30 Day Right of Return