Manufacturer: EVG
Model: 610
Vintage: 2011
Condition: used
Topside Alignment (TSA)
Manual Handling
Manual Controlled Stage
Wafer Size: up to 6"/150mm
Objectives: 5x
Tooling Tray
Uniformity Test Plate
EVG 610 offers Proximity, Soft Contact, Hard Contact or Vacuum Contact Exposure Modes
Tooling Exchanges are Quick, Simple and can be Performed Within Minutes
Lamphouse: 500W
Exposure Optics: Type C, 350nm - 450nm, Broadband
Microsoft Windows based User Interface
System PC, Keyboard, Cables
PDF Manual for EVG 610
30 Day Right of Return
Available for full inspection and demonstration
Installation, training, service and support available with 30 Day Right of Return