Manufacturer: EVG
Model: 610
Vintage: 2011
Condition: used
Refurbishment, warranty, installation, training, service and support available
Available for full inspection and demonstration
Topside Alignment (TSA)
Manual Handling
Manual Controlled Stage
Wafer Size: up to 6"/150mm
Objectives: 5x
Tooling Tray
Uniformity Test Plate
EVG 610 offers Proximity, Soft Contact, Hard Contact or Vacuum Contact Exposure Modes
Tooling Exchanges are Quick, Simple and can be Performed Within Minutes
Lamphouse: 500W
Exposure Optics: Type C, 350nm - 450nm, Broadband
Microsoft Windows based User Interface
System PC, Keyboard, Cables
PDF Manual for EVG 610
30 Day Right of Return

Item ID: LES-9085